专利名称：Manufacturing method of semiconductor
acceleration sensor
发明人：Shinogi, Masataka,Saitoh, Yutaka,Kato, Kenji申请号：EP97302661.0申请日：19970418公开号：EP0802416A3公开日：19990127
专利附图：
摘要：A process for manufacturing a semiconductor acceleration sensor 12 from asemiconductor wafer 1 is disclosed, wherein a piezoresistor 21 is formed on thesemiconductor wafer 1 and the wafer 1 is fixed for dicing with a blade 3 using a freezing
chuck 6.
申请人：Seiko Instruments R&D Center Inc.
地址：8, Nakase 1-chome, Mihama-ku Chiba-shi, Chiba JP
国籍：JP
代理机构：Sturt, Clifford Mark
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