Method for applying a layer of superconducting mat

专利名称：Method for applying a layer of

superconducting material and a devicesuitable therefor

发明人：Deneffe, Kristin,Borghs, Gustaaf Regina申请号：EP90200882.0申请日：19900410公开号：EP0392630A1公开日：19901017

专利附图：

摘要：A method is described wherein different layers can be applied to substrates at alow temperature (about 400°C) wherein interactions, that is, diffusion or reactions,

between substrate and layers to be applied thereon are avoided as far as possible. Inaddition an efficient transporting of oxygen containing plasma takes place over thesubstrate along magnetic field lines, generated by two solenoids, because of the

dimensioning of that magnetic field. Even at a pressure of only 10⁻⁵-10⁻⁷ Torr the plasmawill ignite. Optional passivisation of a superconducting layer using an oxide layer can beperformed without oxygen being extracted from the superconducting layer as sufficientoxygen can be brought into the plasma.

申请人：INTERUNIVERSITAIR MICROELEKTRONICA CENTRUM VZW

地址：Kapeldreef 75 B-3030 Leuven-Heverlee BE

国籍：BE

代理机构：Land, Addick Adrianus Gosling

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